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Integration of silicon and diamond, aluminum nitride or aluminum oxide for electronic materials
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1999 (English)In: MRS conference proceedings:III-V and IV-IV Materials and Processing Challenges for Highly Integrated Microelectronics and Optoelectronics. Symposium., 1999Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
1999.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-386557OAI: oai:DiVA.org:uu-386557DiVA, id: diva2:1327973
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MRS
Available from: 2019-06-20 Created: 2019-06-20 Last updated: 2019-06-20

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CiteExportLink to record
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Citation style
  • apa
  • ieee
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Language
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