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Ion-beam based characterization of TiN back contact interlayers for CZTS(e), thin film solar cells
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, Applied Nuclear Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.ORCID iD: 0000-0001-8686-8721
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2019 (English)In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, E-ISSN 1872-9584, Vol. 450, p. 262-266Article in journal (Refereed) Published
Abstract [en]

Time-of-Flight Elastic Recoil Detection Analysis (ToF-ERDA) and Time-of-Flight Medium-Energy Ion Scattering (ToF-MEIS) have been employed to investigate the potential of TiN thin films as intermediate layers on Mo back contact in CZTS(e) solar cells. TiN films of various thicknesses (20, 50 and 200 nm) were prepared with reactive DC magnetron sputtering and atomic layer deposition on Mo/SLG (soda-lime glass) substrates and annealed ex situ in either S or Se atmosphere. In situ annealing of the samples to different temperatures was also performed in the MEIS setup together with subsequent ToF-MEIS and ERDA analysis. The results of the sample and interlayer composition profiles, layer quality and thickness distributions are discussed in context with complementary experimental findings partially obtained previously by X-ray Photoelectron Spectroscopy (XPS), X-ray Diffraction (XRD), Scanning Electron Microscopy and Scanning Transmission Electron Microscopy- Electron Energy Loss Spectroscopy (STEM - EELS).

Place, publisher, year, edition, pages
2019. Vol. 450, p. 262-266
Keywords [en]
ToF-ERDA, ToF-MEIS, TiN, Annealing, CZTS(e), Thin film solar cell, Interlayer
National Category
Materials Chemistry Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-390990DOI: 10.1016/j.nimb.2018.06.020ISI: 000474501400054OAI: oai:DiVA.org:uu-390990DiVA, id: diva2:1343847
Conference
23rd International Conference on Ion Beam Analysis (IBA), OCT 08-13, 2017, Fudan Univ, Handan Campus, Shanghai, PEOPLES R CHINA
Funder
Swedish Research Council, 821-2012-5144Swedish Foundation for Strategic Research , RIF14-0053Available from: 2019-08-19 Created: 2019-08-19 Last updated: 2020-01-08Bibliographically approved

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Paneta, ValentinaEnglund, SvenSuvanam, Sethu SavedaScragg, Jonathan J.Platzer Björkman, CharlottePrimetzhofer, Daniel

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Paneta, ValentinaEnglund, SvenSuvanam, Sethu SavedaScragg, Jonathan J.Platzer Björkman, CharlottePrimetzhofer, Daniel
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Applied Nuclear PhysicsSolid State Electronics
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Materials ChemistryEngineering and Technology

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