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Thick Silicides Synthesised With Smooth Surface for Integrated TFBAR Applications
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films Group)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films Group)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films Group)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Device Group)
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2008 (English)In: 2008 European Frequency and Time Forum, Toulouse, France, 2008Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2008.
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
URN: urn:nbn:se:uu:diva-88223OAI: oai:DiVA.org:uu-88223DiVA: diva2:139742
Conference
European Frequency and Time Forum
Projects
SSF-ICTEAWISENET
Available from: 2009-01-26 Created: 2009-01-26 Last updated: 2016-04-13

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Martin, DavidYantchev, VentsislavOlsson, JorgenKatardjiev, Ilia

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