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Micromachined thermally compensated thin film Lamb wave resonator for frequency control and sensing applications
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2009 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 19, no 3, 035018- p.Article in journal (Refereed) Published
Abstract [en]

Micromachined thin film plate acoustic wave resonators (FPAR) utilizing the lowest order symmetric Lamb wave (S0) propagating in highly textured 2μm thick Aluminum Nitride (AlN) membranes have been successfully demonstrated [1]. The proposed devices have a SAW-based design and exhibit Q factors of up to 3000 at a frequency around 900MHz as well as design flexibility with respect to the required motional resistance. However, a notable drawback of the proposed devices is non-zero temperature coefficient of frequency (TCF) which lies in the range -20 ppm/K to –25 ppm/K. Thus, despite the promising features demonstrated, further device optimization is required. In this work temperature compensation of thin AlN film Lamb wave resonators is studied and experimentally demonstrated. Temperature compensation while retaining at the same time the device electromechanical coupling is experimentally demonstrated. The zero TCF Lamb wave resonators are fabricated onto composite AlN/SiO2 membranes. Q factors of around 1400 have been measured at a frequency of around 755 MHz. Finally, the impact of technological issues on the device performance is discussed in view of improving the device performance.

Place, publisher, year, edition, pages
2009. Vol. 19, no 3, 035018- p.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electronics
Identifiers
URN: urn:nbn:se:uu:diva-89404DOI: 10.1088/0960-1317/19/3/035018ISI: 000263678200019OAI: oai:DiVA.org:uu-89404DiVA: diva2:160293
Projects
WISENET
Funder
Swedish Research Council, 2009-5056
Available from: 2009-02-12 Created: 2009-02-12 Last updated: 2017-12-14Bibliographically approved
In thesis
1. Thin Film Electroacoustic Devices for Biosensor Applications
Open this publication in new window or tab >>Thin Film Electroacoustic Devices for Biosensor Applications
2009 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Biosensors are today important devices within various application areas.

In this thesis a new type of label-free biosensor device is studied, which is fabricated using the same processes used for the fabrication of integrated circuits. This enables tighter integration and further sensors/biosensor miniaturization. The device is a so-called Thin Film Bulk Acoustic Resonator (FBAR). Within this thesis a low temperature reactive sputtering process for growing AlN thin films with a c-axis inclination of 20-30o has been developed. This enables shear mode FBAR fabrication suitable for in-liquid operation, essential for biosensor applications. Shear mode FBARs were fabricated operating at frequencies above 1GHz exhibiting Q values of 100-200 in water and electromechanical coupling factors kt2 of about 1.8%. This made it possible to move the thickness excited shear mode sensing of biological layers into a new sensing regime using substantially higher operation frequencies than the conventionally used quartz crystal microbalance (QCM) operating at 5-20MHz. Measured noise levels of shear mode FBARs in contact with water showed the resolution to be in the range 0.3ng/cm2 to 7.5ng/cm2. This demonstrated the FBAR resolution without any averaging or additional stabilization measures already to be in the same range as the conventional QCM (5ng/cm2), suggesting that FBARs may be a competitive and low cost alternative to QCM. The linear thickness limit for sensing of biomolecular layers was concluded to be larger than the thickness of the majority of the molecular systems envisaged for FBAR biosensor applications. A temperature compensated shear mode FBAR composite structure was demonstrated with retained coupling factor and Q-value by utilizing the second mode of operation. Understanding has been gained on the sensor operation as well as on how the design parameters influence its performance. Specifically, sensitivity amplification utilizing low acoustic impedance layers in the FBAR structure has been demonstrated and explained. Further, temperature compensated Lamb mode (FPAR) devices were also studied and demonstrated with optimized electromechanical couplings.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2009. 96 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 609
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electronics
Identifiers
urn:nbn:se:uu:diva-89424 (URN)978-91-554-7432-4 (ISBN)
Public defence
2009-03-27, Å2005, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 10:15 (English)
Opponent
Supervisors
Projects
wisenet
Available from: 2009-03-06 Created: 2009-02-13 Last updated: 2011-01-17Bibliographically approved
2. Thin Film Plate Acoustic Resonators for Frequency Control and Sensing Applications
Open this publication in new window or tab >>Thin Film Plate Acoustic Resonators for Frequency Control and Sensing Applications
2012 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

The recent development of the commercially viable thin film electro-acoustic technology has triggered a growing interest in the research of plate guided wave or Lamb wave components owing to their unique characteristics. In the present thesis i) an experimental study of the thin film plate resonators (FPAR) performance operating on the lowest symmetrical Lamb wave (S0) propagating in highly textured AlN membranes versus a variety of design parameters has been performed. The S0 mode is excited through an Interdigital Transducer and confined within the structure by means of reflection from metal strip gratings. Devices operating in the vicinity of the stop-band center exhibiting a Q-value of up to 3000 at a frequency around 900MHz have been demonstrated. Temperature compensation of this type of devices has been studied theoretically and successfully realized experimentally for the first time. Further, integrated circuit-compatible S0 Lamb based two-port FPAR stabilized oscillators exhibiting phase noise of -92 dBc/Hz at 1 kHz frequency offset with feasible thermal noise floor below -180 dBc/Hz have been tested under high power for a couple of weeks. More specifically, the FPARs under test have been running without any performance degradation at up to 27 dBm loop power. Further, the S0 mode was experimentally demonstrated to be highly mass and pressure sensitive as well as suitable for in-liquid operation, which together with low phase noise and high Q makes it very suitable for sensor applications; ii) research in view of FPARs operating on other types of Lamb waves as well as novel operation principles has been initiated. In this work, first results on the design, fabrication and characterization of two novel type resonators: The Zero Group Velocity Resonators (ZGVR) and The Intermode-Coupled Thin Film Plate Acoustic Resonators (IC-FPAR), exploiting new principles of operation have been successfully demonstrated. The former exploits the intrinsic zero group velocity feature of the S1 Lamb mode for certain combination of design parameters while the latter takes advantage of the intermode interaction (involving scattering) between S0 and A1 Lamb modes through specially designed metal strip gratings (couplers). Thus both type of resonators operate on principles of confining energy under IDT other than reflection.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2012. 80 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 959
Keyword
Electro-Acoustics, FPAR, Lamb waves, aluminium nitride, interdigital transducer, phase noise, temperature compensation, power handling, sensitivity, zero group velocity, intermode coupling
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Engineering Science with specialization in Electronics; Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-178592 (URN)978-91-554-8437-8 (ISBN)
Public defence
2012-09-28, Polhemsalen, Ångströmlaboratoriet, Läggerhyddsvägen 1, Uppsala, 09:15 (English)
Opponent
Supervisors
Available from: 2012-09-06 Created: 2012-08-01 Last updated: 2013-01-22Bibliographically approved

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Wingqvist, GunillaArapan, LiliaYantchev, VentsislavKatardjiev, Ilia

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