Desktop microfabrication: initial experiments with a piezoceramic
1999 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 9, no 4, 434-437 p.Article in journal (Refereed) Published
A method for building microstructures from a suspension of micrometre-sized piezoelectric particles by depositing droplets on top of droplets and promoting drying is devised. A micromachined dispensing unit similar to a drop-on-demand inkjet-printer head is used. The relation of the vertical building rate to the ejection frequency and the substrate temperature is established, and a mechanism explaining the tubular structures built is proposed.
Place, publisher, year, edition, pages
1999. Vol. 9, no 4, 434-437 p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-89911DOI: 10.1088/0960-1317/9/4/322OAI: oai:DiVA.org:uu-89911DiVA: diva2:161771