Sodium hypochlorite as a developer for heavy ion tracks in polyimide
2001 (English)In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, Vol. 184, no 4, 536-543 p.Article in journal (Refereed) Published
he developing and etching of heavy ion tracks in polyimide with sodium hypochlorite have been studied to gain control over the parameters that affect the etch result. The shape of the resulting pores is a function of both alkalinity and hypochlorite content of the solution. Sodium hypochlorite decomposes during etching, and the rate constant has been determined as a function of the alkalinity at 62 °C. Polished cross-sections have been examined to determine the pore shape, and this method has shown to be a straightforward way to characterise the pores. Decreasing the alkalinity gives more cylindrical pores, but increases the decomposition rate of the hypochlorite solution and decreases the etch rate.
Place, publisher, year, edition, pages
2001. Vol. 184, no 4, 536-543 p.
IdentifiersURN: urn:nbn:se:uu:diva-89913DOI: 10.1016/S0168-583X(01)00794-7OAI: oai:DiVA.org:uu-89913DiVA: diva2:161773