A thermal microactuator made by partial impregnation of polyimide with paraffin
2002 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 12, no 6, 849-854 p.Article in journal (Refereed) Published
We have fabricated and tested thermal, paraffin-impregnated polyimide actuators, utilizing the large volume increase associated with the solid-to-liquid phase transition of paraffin. In the bimorph-like device, the top layer was made porous by ion track technology. Stochastically distributed pores of various lengths (95, 70, 45 and 20 µm) and various lateral coverages (5–45%) were filled with paraffin by liquid substitution or from vacuum, and sealed with epoxy. Actuators, 125 µm thick, 35 mm long and 7 mm wide, have been characterized with respect to tip deflection and load-carrying capacity with one end rigidly clamped. Loaded with 0.6 g or about ten times their own weight at their free end, about 50% of the maximum stroke (17 mm) was still attained.
Place, publisher, year, edition, pages
2002. Vol. 12, no 6, 849-854 p.
IdentifiersURN: urn:nbn:se:uu:diva-89914DOI: 10.1088/0960-1317/12/6/316OAI: oai:DiVA.org:uu-89914DiVA: diva2:161774