Size-Distribution and Emission Spectroscopy of W Nanoparticles Generated byLaser-Assisted CVD for Different WF6/H2/Ar Mixtures
2003 (English)In: Journal of Physical Chemistry B, ISSN 1520-6106, E-ISSN 1520-5207, Vol. 107, no 42, 11615-11621 p.Article in journal (Refereed) Published
Tungsten nanoparticles were produced by ArF excimer laser-assisted chemical vapor deposition fromWF6/H2/Ar gas mixtures. Subsequent pulses excited the gas-phase particles, allowing optical emissionspectroscopy to monitor the intensity of the emitted radiation and temperature of the laser-heated particles.A systematic study on size-distributions of the deposited particles, determined by electron microscopy, inconnection with emission spectroscopy and rate of deposition measurements is presented, with respect todifferent partial pressures of the reactants. The rates of deposition of W nanoparticle films were determinedby X-ray fluorescence spectroscopy. In addition, the intensity of the scattered 193 nm laser line was alsomonitored as the partial pressure of H2 was varied.
Place, publisher, year, edition, pages
2003. Vol. 107, no 42, 11615-11621 p.
Engineering and Technology Natural Sciences
IdentifiersURN: urn:nbn:se:uu:diva-90506DOI: 10.1021/jp0343077OAI: oai:DiVA.org:uu-90506DiVA: diva2:162881