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A flexible laboratory-scale approach to alloying and tailoring of thin films by single-magnetron co-sputtering
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science.
2004 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 467, no 1-2, 10-15 p.Article in journal (Refereed) Published
Abstract [en]

Alloying thin solid films can be difficult, especially when more than two substances are involved and a low deposition temperature is required. If additional demands like flexibility, stability and straightforward process control are stated, the number of deposition processes at hand is rather limited. Therefore, a co-sputtering technique involving the partial coverage of a target surface with metal foil has been studied in this work. Adopted from an earlier work, it was expanded to magnetron sputtering in order to better suit general, small-scale alloying of thin films and coatings. To evaluate the process, carbon coatings were alloyed by co-sputtering a carbon target with Al, Ta, W or Zr foil. The influence of metal type and degree of target coverage on film composition and properties was investigated. It is concluded that this co-sputtering approach can be used to alloy thin films and coatings in a very simple and straightforward manner, with excellent possibilities of controlling the amount of alloying elements. Coating deposition proved successful, yielding films with a wide compositional variety. The process temperature was 70 °C and stability during operation excellent. Depending on type and amount of metal added, the grown coatings ranged from amorphous to highly crystalline. Their mechanical properties were also shown to vary greatly with chemical composition.

Place, publisher, year, edition, pages
2004. Vol. 467, no 1-2, 10-15 p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-92113DOI: 10.1016/j.tsf.2004.02.029OAI: oai:DiVA.org:uu-92113DiVA: diva2:165077
Available from: 2004-09-10 Created: 2004-09-10 Last updated: 2013-07-30Bibliographically approved
In thesis
1. Synthesis and Evaluation of TaC:C Low-Friction Coatings
Open this publication in new window or tab >>Synthesis and Evaluation of TaC:C Low-Friction Coatings
2004 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

In the large family of carbon-based coatings there are members capable of providing a rare and very desirable combination of high wear resistance and low friction. The field of application for this kind of coatings is steadily increasing which, naturally, give raise to new questions and demands.

Coatings of this type can be produced in a number of different ways, but the parameter influencing their properties most is the chemical composition. To facilitate investigations of the compositional impact on the synthesis and properties of coatings, a way to alloy magnetron-sputtered thin films was developed in this thesis. It does not involve the use of reactive gases or additional material sources; instead metallic foils are attached onto the magnetron target surface and thus sputtered alongside the target material. This co-sputtering route was later used to synthesize carbon coatings alloyed with Ta, Zr, W and Al in various amounts and configurations.

It was shown that the co-sputtering method could be used to alloy coatings in a very simple and straightforward manner, with excellent possibilities of controlling the amount of alloying elements. The process temperature could be kept as low as 70 °C.

Carbon coatings alloyed with transition metals (MeC:C) displayed polycrystalline nanocomposite structures with 5 nm metal carbide crystallites in a matrix of near-amorphous carbon. Alloying with Ta resulted in a radical 80 % reduction in friction coefficient during dry sliding in air, from 0.22 for pure carbon to 0.04 for TaC:C. This was found to be due to facilitated graphitization and the formation of lubricating surface oxides. Al additions to TaC:C resulted in a transformation of the TaC phase to a metastable, previously unreported Ta1-χAlχC. The coefficient of friction remained unaltered, but the oxidation rate compared to TaC:C was significantly reduced due to the formation of AlTaO4 instead of Ta2O5.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2004. 49 p.
Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1104-232X ; 1011
Materials science, Materialvetenskap
National Category
Materials Engineering
Research subject
Materials Science
urn:nbn:se:uu:diva-4544 (URN)91-554-6034-8 (ISBN)
Public defence
2004-10-01, Siegbahnsalen, Ångströmlaboratoriet, Polacksbacken, Uppsala, 09:15
Available from: 2004-09-10 Created: 2004-09-10Bibliographically approved

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Wiklund, Urban
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