Micromachined Loop Antennas for Low Resistivity Silicon Substrates
2006 (English)In: IEEE Transactions on Antennas and Propagation, ISSN 0018-926X, E-ISSN 1558-2221, Vol. 54, no 12, 3593-3601 p.Article in journal (Refereed) Published
The integration of K-band (2040 GHz) full wavelength square wire- and slot-loop antennas on low resistivity (11-70 Omega cm) silicon substrates is addressed. By the use of polymer or silicon oxide/nitride membranes to support the slot or wire loop over micromachined trenches the efficiency of the antennas is enhanced while the majority of the bulk silicon within the apterture of the antenna is preserved to enable the integration of active devices. A 3.6 x 3.6 mm(2) large slot loop antenna chip with 200 mu m micromachined trench width yields 1.5 dBi gain at 29.5 GM, while 1.0 dBi gain is obtained at 24 GHz for a wire loop antenna on a 4.5 x 4.5 mm(2) large chip with 360 mu m wide trenches.
Place, publisher, year, edition, pages
2006. Vol. 54, no 12, 3593-3601 p.
loop antennas, micromachining, silicon, slot antennas
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-93965DOI: 10.1109/TAP.2006.886532ISI: 000242814800009OAI: oai:DiVA.org:uu-93965DiVA: diva2:167629