Fabrication and Mechanical Characterization of LCVD-Deposited Carbon Micro-Springs
2006 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, Vol. 130-131, 358-364 p.Article in journal, Meeting abstract (Refereed) Published
Carbon micro-springs were fabricated using laser-assisted chemical vapor deposition (LCVD) at laser powers and ethylene pressures ranging between 200 and 700 mW and 400 and 900 mbar, respectively. A scanning electron microscope was used to determine geometrical parameters such as wire diameter, outside coil diameter, spacing, and pitch. The spring rates for nine batches of springs – chosen from the extremes and middle of the processing ranges – were determined with values ranging between 0.0294 and 0.0604 mN/ m. With the spring rate values, trends regarding the shear modulus and the modulus elasticity of the carbon material as a function of laser power and precursor pressure were deduced. The shear moduli of the chosen batches had values between 13.6 and 733.5 MPa, and using a Poisson’s ratio value of 0.3 the moduli of elasticity ranged from 0.0353 to 1.9071 MPa.
Place, publisher, year, edition, pages
2006. Vol. 130-131, 358-364 p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-94081DOI: 10.1016/j.sna.2005.10.022OAI: oai:DiVA.org:uu-94081DiVA: diva2:167810
Selected Papers from TRANSDUCERS '05 — The 13th International Conference on Solid-State Sensors, Actuators and Microsystems - Seoul, Korea, 5-9 June 2005