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Fabrication and Mechanical Characterization of LCVD-Deposited Carbon Micro-Springs
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Materials Chemistry, Inorganic Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
2006 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, Vol. 130-131, 358-364 p.Article in journal, Meeting abstract (Refereed) Published
Abstract [en]

Carbon micro-springs were fabricated using laser-assisted chemical vapor deposition (LCVD) at laser powers and ethylene pressures ranging between 200 and 700 mW and 400 and 900 mbar, respectively. A scanning electron microscope was used to determine geometrical parameters such as wire diameter, outside coil diameter, spacing, and pitch. The spring rates for nine batches of springs – chosen from the extremes and middle of the processing ranges – were determined with values ranging between 0.0294 and 0.0604 mN/ m. With the spring rate values, trends regarding the shear modulus and the modulus elasticity of the carbon material as a function of laser power and precursor pressure were deduced. The shear moduli of the chosen batches had values between 13.6 and 733.5 MPa, and using a Poisson’s ratio value of 0.3 the moduli of elasticity ranged from 0.0353 to 1.9071 MPa.

Place, publisher, year, edition, pages
2006. Vol. 130-131, 358-364 p.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-94081DOI: 10.1016/j.sna.2005.10.022OAI: oai:DiVA.org:uu-94081DiVA: diva2:167810
Conference
Selected Papers from TRANSDUCERS '05 — The 13th International Conference on Solid-State Sensors, Actuators and Microsystems - Seoul, Korea, 5-9 June 2005
Available from: 2006-03-03 Created: 2006-03-03 Last updated: 2013-03-21Bibliographically approved
In thesis
1. Laser-assisted CVD Fabrication and Characterization of Carbon and Tungsten Microhelices for Microthrusters
Open this publication in new window or tab >>Laser-assisted CVD Fabrication and Characterization of Carbon and Tungsten Microhelices for Microthrusters
2006 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Laser-induced chemical vapor deposition (LCVD) is a process enabling the deposition of solid material from a gas phase in the form of free-standing microstructures with high aspect ratios. The deposition rate, wire diameter, and material properties are sensitive to changes in temperature and gas pressure. Through experimentation these dependencies are clarified for carbon and tungsten-coated carbon microhelices to be used as heating elements in cold gas microthrusters for space applications. The integration of heaters into the thruster will raise the temperature of the gas; thus, improving the efficiency of the thruster based on specific impulse.

Deposition rate is measured during the fabrication process, and the geometrical dimensions of the spring are determined through microscopy analysis. By experimentally measuring the spring rate, material properties such as shear modulus and modulus of elasticity for LCVD-deposited carbon can be determined as a function of process parameters.

Electrothermal characterization of carbon and tungsten-coated microcoils is performed by resistively heating the coils and measuring their surface temperature and resistance in atmospheres relevant to their operating environments. Through high-resolution microscopy analysis, sources having detrimental effects on the coils are detected and minimized. The results gained from these experiments are important for efforts in improving the performance of cold gas microthrusters.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2006. x+39 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 151
Keyword
Engineering physics, LCVD, Carbon, Tungsten, Microspring, Resistance, Teknisk fysik
National Category
Other Engineering and Technologies
Identifiers
urn:nbn:se:uu:diva-6551 (URN)91-554-6480-7 (ISBN)
Public defence
2006-03-24, Polhemsalen, The Ånsgström Laboratory, Lägerhyddsvägen 1, Uppsala, 10:00
Opponent
Supervisors
Available from: 2006-03-03 Created: 2006-03-03Bibliographically approved

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