Optical Excitation of Surface Phonon Polaritons in Silicon Carbide by a Hole Array Fabricated by a Focused Ion Beam
2007 (English)In: Optical materials (Amsterdam), ISSN 0925-3467, E-ISSN 1873-1252, Vol. 30, no 2, 328-333 p.Article in journal (Refereed) Published
Silicon carbide (SiC) is a polar material with a lattice resonance in the thermal infrared causing a wavelength interval with a negative dielectric function. Within this interval SiC can support surface waves. To excite surface waves, i.e., surface phonon polaritons (SPP), the sample has to be structured with a periodic micro-pattern. The possibilities of using a focused ion beam (FIB) for microfabrication of periodic microstructures in silicon carbide (SiC) is investigated. We present optimized parameters for the microfabrication of SiC with a FIB, as well as calculated and experimental optical results confirming the sensitive optical properties of the material required for the surface excitation are not destroyed by the preparation process.
Place, publisher, year, edition, pages
2007. Vol. 30, no 2, 328-333 p.
Ionic crystals, Microstructure fabrication, Surface waves, Polaritons
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-94547DOI: 10.1016/j.optmat.2006.11.064ISI: 000250189300022OAI: oai:DiVA.org:uu-94547DiVA: diva2:168428