uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
MEMS-based VCSEL beam steering using replicated polymer diffractive lens
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Micro Structural Technology.
Show others and affiliations
2008 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 142, no 1, 336-345 p.Article in journal (Refereed) Published
Abstract [en]

This paper describes a fully integrated micro-optical system, in which dynamic angular control of the beam from a vertical cavity surface emitting laser (VCSEL) is realized by laterally moving a collimating diffractive lens in the light path. The lens is mounted on a translatable silicon stage, which consists of a frame with an opening for the light to traverse the lens and electro-statically driven comb actuators, by which the lateral movement is achieved. Devices implementing both one-(1D) and two-dimensional (2D) scanning have been fabricated and evaluated. Integration of the lens onto the translatable silicon stage is done using a newly developed fabrication process based on hot embossing of an amorphous fluorocarbon polymer. This fabrication process relies on a reversed-order protocol, where the structuring of the optical element precedes the silicon microstructuring. Assembly and packaging of the VCSEL-MOEMS system, using low temperature cofired ceramic (LTCC) technique, is also demonstrated. Optical evaluation of the system and beam steering function shows significant beam deflection for a relatively low driving voltage (similar to 70 V).

Place, publisher, year, edition, pages
2008. Vol. 142, no 1, 336-345 p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-95122DOI: 10.1016/j.sna.2006.12.015ISI: 000253613100050OAI: oai:DiVA.org:uu-95122DiVA: diva2:169211
Available from: 2006-11-22 Created: 2006-11-22 Last updated: 2016-04-13Bibliographically approved
In thesis
1. Single-Molecule Detection and Optical Scanning in Miniaturized Formats
Open this publication in new window or tab >>Single-Molecule Detection and Optical Scanning in Miniaturized Formats
2006 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

In later years polymer replication techniques have become a frequently employed fabrication method for microfluidic and micro-optical devices. This thesis describes applications and further developments of microstructures replicated in polymer materials.

A novel method for homogenous amplified single-molecule detection utilizing a microfluidic readout format is presented. The method enables enumeration of single biomolecules by transforming specific molecular recognition events at nanometer dimensions to micrometer-sized DNA macromolecules. This transformation process is mediated by target specific padlock probe ligation, followed by rolling circle amplification (RCA) resulting in the creation of one rolling circle product (RCP) for each recognized target. Throughout this transformation the discrete nature of the molecular population is preserved. By hybridizing a fluorescence-labeled DNA detection oligonucleotide to each repeated sequence of the RCP, a confined cluster of fluorophores is generated, which makes optical detection and quantification possible. Spectral multiplexing is also possible since the spectral profile of each RCP can be analyzed separately. The microfluidic data acquisition process is characterized in detail and conditions that allow for quantification limited only by Poisson sampling statistics is established. The molecular characteristics of RCPs in solution are also investigated.

Furthermore a novel thermoplastic microfluidic platform is described. The platform allows for observation of the microchannels using high magnification optics and also offers the possibility of on-chip cell culture and the integration of mechanical actuators.

A novel fabrication process for the integration of polymer micro-optical elements on silicon is presented. The process is used for fabrication of a micro-optical system consisting of a laser and a movable microlens making beam steering possible. Such a micro-scanning system could potentially be used for miniaturized biochemical analysis.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2006. 61 p.
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 240
Biotechnology, microfluidics, single-molecule detection, MOEMS, μTAS, lab-on-a-chip, RCA, thermoplastics, injection molding, hot embossing, Bioteknik
urn:nbn:se:uu:diva-7268 (URN)91-554-6715-6 (ISBN)
Public defence
2006-12-14, Siegbahnsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 13:15
Available from: 2006-11-22 Created: 2006-11-22Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Nikolajeff, Fredrik
By organisation
Micro Structural Technology
In the same journal
Sensors and Actuators A-Physical
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 471 hits
ReferencesLink to record
Permanent link

Direct link