MEMS-based VCSEL beam steering using replicated polymer diffractive lens
2008 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 142, no 1, 336-345 p.Article in journal (Refereed) Published
This paper describes a fully integrated micro-optical system, in which dynamic angular control of the beam from a vertical cavity surface emitting laser (VCSEL) is realized by laterally moving a collimating diffractive lens in the light path. The lens is mounted on a translatable silicon stage, which consists of a frame with an opening for the light to traverse the lens and electro-statically driven comb actuators, by which the lateral movement is achieved. Devices implementing both one-(1D) and two-dimensional (2D) scanning have been fabricated and evaluated. Integration of the lens onto the translatable silicon stage is done using a newly developed fabrication process based on hot embossing of an amorphous fluorocarbon polymer. This fabrication process relies on a reversed-order protocol, where the structuring of the optical element precedes the silicon microstructuring. Assembly and packaging of the VCSEL-MOEMS system, using low temperature cofired ceramic (LTCC) technique, is also demonstrated. Optical evaluation of the system and beam steering function shows significant beam deflection for a relatively low driving voltage (similar to 70 V).
Place, publisher, year, edition, pages
2008. Vol. 142, no 1, 336-345 p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-95122DOI: 10.1016/j.sna.2006.12.015ISI: 000253613100050OAI: oai:DiVA.org:uu-95122DiVA: diva2:169211