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Lateral-field-excited thin-film Lamb wave resonator
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2005 (English)In: Applied Physics Letters, ISSN 0003-6951, Vol. 86, no 15, 154103- p.Article in journal (Refereed) Published
Abstract [en]

The basic principles and technology for the development of lateral-field-excited Lamb acoustic wave resonators on sputter-deposited c-oriented thin aluminum nitride films are presented. The experimental results demonstrate that Lamb waves can be successfully used as an alternative to high-velocity surface acoustic waves.

Place, publisher, year, edition, pages
AIP , 2005. Vol. 86, no 15, 154103- p.
Keyword [en]
Thin Films, Lamb waves, Resonators, High Frequency, Ultrasonics
Identifiers
URN: urn:nbn:se:uu:diva-95550DOI: 10.1063/1.1900312OAI: oai:DiVA.org:uu-95550DiVA: diva2:169812
Projects
SSF ICTEA
Available from: 2007-03-08 Created: 2007-03-08 Last updated: 2010-02-17Bibliographically approved
In thesis
1. Advanced Thin Film Electroacoustic Devices
Open this publication in new window or tab >>Advanced Thin Film Electroacoustic Devices
2007 (English)Doctoral thesis, comprehensive summary (Other academic)
Alternative title[sv]
Avancerade Elektroakustiska Tunnfilmskomponenter
Abstract [en]

The explosive development of the telecom industry and in particular wireless and mobile communications in recent years has lead to a rapid development of new component and fabrication technologies to continually satisfy the mutually exclusive requirements for better performance and miniaturization on the one hand and low cost on the other. A fundamental element in radio communications is time and frequency control, which in turn is achieved by high performance electro-acoustic components made on piezoelectric single crystalline substrates. The latter, however, reach their practical limits in terms of performance and cost as the frequency of operation reaches the microwave range. Thus, the thin film electro-acoustic technology, which uses thin piezoelectric films instead, has been recently developed to alleviate these deficiencies.

This thesis explores and addresses a number of issues related to thin film synthesis on the one hand as well as component design and fabrication on other. Specifically, the growth of highly c-axis textured AlN thin films has been studied and optimized for achieving high device performance. Perhaps, one of the biggest achievements of the work is the development of a unique process for the deposition of AlN films with a mean c-axis tilt, which is of vital importance for the fabrication of resonators operating in contact with liquids, i.e. biochemical sensors. This opens the way for the development of a whole range of sensors and bio-analytical tools. Further, high frequency Lamb wave resonators have been designed, fabricated and evaluated. Performance enhancement of FBAR devices is also addressed, e.g. spurious mode suppression, temperature compensation, etc. It has been demonstrated, that even without temperature compensation, shear mode resonators operating in a liquid still exhibit an excellent performance in terms of Q (200) and coupling (~1.8%) at 1.2 GHz, resulting in a mass resolution better than 2 ng cm-2 in water, which excels that of today’s quartz sensors.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2007. 84 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 280
Keyword
Technology, aluminum nitride, FBAR, shear mode resonator, lamb wave devices, liquid sensor, biosensor, temperature compensation, reactive sputtering, TEKNIKVETENSKAP
National Category
Engineering and Technology
Identifiers
urn:nbn:se:uu:diva-7672 (URN)978-91-554-6819-4 (ISBN)
Public defence
2007-03-30, Polhemssalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 09:30 (English)
Opponent
Supervisors
Available from: 2007-03-08 Created: 2007-03-08 Last updated: 2010-02-18Bibliographically approved

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Bjurström, Johan

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