Thin film Lamb wave resonant structures - The first approach
2006 (English)In: Solid-State Electronics, ISSN 0038-1101, Vol. 50, no 3, 322-326 p.Article in journal (Refereed) Published
Resonant Lamb wave based geometries on c-oriented aluminum nitride (AlN) thin film membranes are studied. Attention has been focused on the lowest order symmetric Lamb mode because of its extremely high velocity approaching 10,600 m/s. The Lamb waves have been excited by means of both inter-digital transducers (IDT) and longitudinal wave (LW) transducers. Two basic reflector geometries have been used along with the conventional one-port resonator topology. The experimental results obtained demonstrate that Lamb waves can be successfully used as an alternative to high velocity surface acoustic waves. A discussion regarding the ways for improving the device performance is provided, and hence future research aspects in the area are identified.
Place, publisher, year, edition, pages
2006. Vol. 50, no 3, 322-326 p.
Ultrasonics, Lamb waves, resonator, Thin film, High frequency
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-95551DOI: 10.1016/j.sse.2006.01.012OAI: oai:DiVA.org:uu-95551DiVA: diva2:169813