uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Multilayered metal oxide nanotubes deposited in a template based process using atomic layer deposition
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry.
Show others and affiliations
Manuscript (Other academic)
URN: urn:nbn:se:uu:diva-97312OAI: oai:DiVA.org:uu-97312DiVA: diva2:172188
Available from: 2008-05-14 Created: 2008-05-14 Last updated: 2010-01-13Bibliographically approved
In thesis
1. Metal Oxide Thin Films and Nanostructures Made by ALD
Open this publication in new window or tab >>Metal Oxide Thin Films and Nanostructures Made by ALD
2008 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Thin films of cobalt oxide, iron oxide and niobium oxide, and nanostructured thin films of iron oxide, titanium oxide and multilayered iron oxide/titanium oxide have been deposited by Atomic Layer Deposition (ALD). The metal oxides were grown using the precursor combinations CoI2/O2, Fe(Cp)2/O2, NbI5/O2 and TiI4/H2O. The samples were analysed primarily with respect to phase content, morphology and growth characteristics.

Thin films deposited on Si (100) were found to be amorphous or polycrystalline, depending on deposition temperature and the oxide deposited; cobalt oxide was also deposited on MgO (100), where it was found to grow epitaxially with orientation (001)[100]Co3O4||(001)[100]MgO. As expected, the polycrystalline films were rougher than the amorphous or the epitaxial films. The deposition processes showed properties characteristic of self-limiting ALD growth; all processes were found to have a deposition temperature independent growth region. The deposited films contained zero or only small amounts of precursor residues.

The nanostructured films were grown using anodic aluminium oxide (AAO) or carbon nanosheets as templates. Nanotubes could be manufactured by depositing a thin film which covers the pore walls of the AAO template uniformly; free-standing nanotubes retaining the structure of the template could be fabricated by removing the template. Multilayered nanotubes could be obtained by depositing multiple layers of titanium dioxide and iron oxide in the pores of the AAO template. Carbon nanosheets were used to make titanium dioxide nanosheets with a conducting graphite backbone. The nucleation of the deposited titanium dioxide could be controlled by acid treatment of the carbon nanosheets.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2008. 56 p.
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 441
Inorganic chemistry, Atomic layer deposition, Metal oxide, Nanostructures, Template deposition, Thin films, Oorganisk kemi
urn:nbn:se:uu:diva-8898 (URN)978-91-554-7220-7 (ISBN)
Public defence
2008-06-05, Å 2005, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 10:15
Available from: 2008-05-14 Created: 2008-05-14Bibliographically approved

Open Access in DiVA

No full text

By organisation
Department of Materials Chemistry

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 199 hits
ReferencesLink to record
Permanent link

Direct link