A metallic micropump for high-pressure microfluidics
2008 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 18, no 11, 115009- p.Article in journal (Refereed) Published
This paper presents one of the strongest mechanical sub-cm(3) sized micropumps for microfluidics. It consists of two active valves and one pumping chamber, each operated by a paraffin actuator that is driven by a low-voltage square pulse waveform. The pump is fabricated in a simple process using parylene-coated stainless steel stencils, paraffin and copper clad polyimide. When driving the pump at 0.07 Hz and 2.0 V (0.8 W) per actuator, it pumped water without leakage at a flow rate of 0.75 mu L min(-1) up to above 50 bar (5 MPa) back-pressure. The frequency dependence was evaluated and a maximum flow rate of 1 mu L min(-1) at 0.21 Hz and 1.8 V was observed. A thermomechanical FEM analysis, which was in good agreement with experiments at low frequencies, predicts the behaviour at higher frequencies.
Place, publisher, year, edition, pages
2008. Vol. 18, no 11, 115009- p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-97829DOI: 10.1088/0960-1317/18/11/115009ISI: 000260263900009OAI: oai:DiVA.org:uu-97829DiVA: diva2:172913