uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Design and manufacturing considerations of low voltage multilayer P(VDF-TrFE) actuators
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
2009 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 19, no 11, 115019- p.Article in journal (Refereed) Published
Abstract [en]

An actuator unit consisting of three multilayered cantilevers with poly(vinylidene fluoride-trifluoroethylene) on top of a flexible printed circuit board substrate is presented. The multilayer structure has five active polymer layers and six electrodes with an alternating ground and phase configuration. Different aspects regarding processing and deflection advantages, depending on which side of the substrate the multilayer structure is manufactured, are discussed.  One of the cantilever configurations is dynamically modelled using a finite element software and the results are compared to measured values. Because of the combination of a multilayer design and the resonant driving mode, the actuators could be powered by solar cells or used in portable electronics. A 2 V sine wave signal resulted in a tip deflection of 56 μm. To test the unit as a conveyer, speed measurements were conducted. With a 2.5 V square wave signal the speed was 29 µm/s whereas a 8 V signal resulted in 732 µm/s. Motion in all four directions could be confirmed by tuning the frequency of a 10 V square wave signal from 640 Hz to 740 Hz.

Place, publisher, year, edition, pages
Institute of Physics Publishing , 2009. Vol. 19, no 11, 115019- p.
Keyword [en]
Multilayer, actuator, cantilever, PVDF-TrFE, low voltage, resonating structure
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
URN: urn:nbn:se:uu:diva-108484DOI: 10.1088/0960-1317/19/11/115019ISI: 000270967800020OAI: oai:DiVA.org:uu-108484DiVA: diva2:236036
Available from: 2009-09-20 Created: 2009-09-20 Last updated: 2016-04-14Bibliographically approved
In thesis
1. Applications of active materials
Open this publication in new window or tab >>Applications of active materials
2009 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Energy efficiency is a vital key component when designing and miniaturizing self sustained microsystems. The smaller the system, the smaller is the possibility to store enough stored energy for a long and continuous operational time. To move such a system in an energy efficient way, a piezoelectrical locomotion module consisting of four resonating cantilevers has been designed, manufactured and evaluated in this work. The combination of a suitable substrate, a multilayered piezoelectric material to reduce the voltage, and a resonating drive mechanism resulted in a low power demand.

A manufacturing process for multilayer cantilever actuators made of P(VDF-TrFE) with aluminum electrodes on a substrate of flexible printed circuit board (FPC), has been developed. An important step in this process was the development of an etch recipe for dry etching the multilayer actuators in an inductive plasma equipment.

Formulas for the quasi static tip deflection and resonance frequency of a multilayered cantilever, have been derived. Through theses, it was found that the multilayered structures should be deposited on the polymer side of the FPC in order to maximize the tip deflection.

Both a large and a miniaturized locomotion module were manufactured and connected by wires to verify that the three legged motion principal worked to move the structures forward and backward, and turn it right and left. By touching and adding load, to a fourth miniaturized cantilever, its ability to act as a contact sensor and carry object was verified.

The presented locomotion module is part of a multifunctional microsystem, intended to be energy efficient and powered by a solar panel with a total volume of less than 25 mm3 and weight 65 mg. The whole system, consisting of a solar cell, an infra red communication module, an integrated circuit for control, three capacitors for power regulating, the locomotion module and an FPC connecting the different modules, was surface mounted using a state of the art industrial facility. Two fully assembled systems could be programmed both through a test connector and through optical sensors in the multifunctional solar cell. One of these was folded together to the final configuration of a robot. However, the entire system could not be tested under full autonomous operating conditions. On the other hand, using wires, the locomotion module could be operated and used to move the entire system from a peak-to-peak voltage of 3.0 V.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2009. 77 p.
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 672
Energy efficient, microsystem, resonating cantilevers, microactuators, P(VDF-TrFE), surface mounting assembly, multi layers, flexible printed circuit board, conveyer, three legged
National Category
Materials Engineering
Research subject
Materials Science
urn:nbn:se:uu:diva-108696 (URN)978-91-554-7609-0 (ISBN)
Public defence
2009-10-30, 2001, Ångström Laboratory, Uppsala, 10:15 (Swedish)
Available from: 2009-10-09 Created: 2009-09-28 Last updated: 2009-10-09Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Edqvist, ErikHedlund, Emma
By organisation
Microsystems Technology
In the same journal
Journal of Micromechanics and Microengineering
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 417 hits
ReferencesLink to record
Permanent link

Direct link