Resonating low voltage P(VDF-TrFE) multilayered microactuator built on flexible printed circuit board
(English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158Article in journal (Refereed) Submitted
A resonating low voltage microactuator module is presented and evaluated as conveyer. The characterized module has four cantilevers, of which three are used as legs and one as a sensor. A lithographically patterned flexible printed circuit board acts as the passive part of the cantilever whereas the active part consist of 14 layers of spin coated poly(vinylidenefluoride-trifluoroethylene) with alternating evaporated aluminum electrodes. Among the process steps developed are: a batchwise contacting of the multilayer stack, a batchwise polarization method, and an extended polarization procedure. In the final manufacturing step, the legs are bent 60° out of the plane using a folding equipment. The locomotion module is characterized by connecting it with four copper wires and tested with the legs downwards and upside down against a glass plate. Different weights are added to the module and different driving voltage levels and frequencies are tested. The module was found to operate already at 3.0 V peak-to-peak and capable of forward, backward, right and left movement. With wires attached to it, and using a 80 V peak-to-peak square wave signal at 18020 Hz, it could move 150 mg, which is more than 37 times it own weight.
PVDF-TrFE, conveyer, microrobot, batch polarisation, three legs, resonating operation
Other Materials Engineering Other Materials Engineering
Research subject Engineering Science with specialization in Microsystems Technology
IdentifiersURN: urn:nbn:se:uu:diva-108485OAI: oai:DiVA.org:uu-108485DiVA: diva2:236038