A vibrating microcantilever sensor for microrobotic applications
(English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439Article in journal (Refereed) Submitted
In order to actively interact with the environment and to perform advanced tasks, microrobots need to be equipped with sensing tools to detect object and obstacles, and eventually manipulate and transport micro-parts. The concept, design, simulations and first characterization of a simple multifunctional microsystem, a vibrating microcantilever, capable of working as touch sensor and potentially as manipulation tool with feedback sensing is presented. The presented microcantilever was designed to be integrated onboard a microrobot of about 3 × 3 × 3 mm3. The microcantilever is applied as a sensing antenna on the microrobot in order to recognize objects or obstacles through direct contact, causing a voltage drop in a feedback layer. The microcantilever produced is 2.85×0.45×0.098 mm, and the experiments verified that it could be used as a contact sensor featuring high sensitivity with extremely low power consumption and good mass-manufacturability.
IdentifiersURN: urn:nbn:se:uu:diva-108495OAI: oai:DiVA.org:uu-108495DiVA: diva2:236049