uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
A 2 GHz oscillator using a monolithically integrated AlN TFBAR
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Tunnfilmsgruppen)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Tunnfilmsgruppen)
2008 (English)Conference paper, Published paper (Refereed)
Abstract [en]

A 2 GHz oscillator based on a solidly mounted AlN thin-film bulk acoustic resonator (TFBAR) is reported. The oscillator is realised as a silicon-on-silicon multi-chip module (MCM) where all passive elements, including the TFBAR, are monolithically integrated on a high-resistivity silicon (HRS) carrier. SiGe transistors are flip-chip mounted on the MCM carrier. Measurements of the oscillators reveal a best phase-noise of -125 dBc/Hz at 100 kHz offset.

Place, publisher, year, edition, pages
2008. 843-846 p.
Series
IEEE MTT-S International Microwave Symposium Digest, ISSN 0149-645X
Keyword [en]
Ge-Si alloys, III-V semiconductors, acoustic resonators, aluminium compounds, flip-chip devices, multichip modules, oscillators, phase noise, semiconductor thin films, thin film devices, transistors, wide band gap semiconductors, AlN, AlN TFBAR, AlN thin-film bulk acoustic resonator, Si, SiGe, SiGe transistors, frequency 2 GHz, high-resistivity silicon, oscillator, silicon-on-silicon multi-chip module, Acoustic resonator, TFBAR, hybrid integration, multi-chip module, oscillator, thin film device
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-110989DOI: 10.1109/MWSYM.2008.4632964OAI: oai:DiVA.org:uu-110989DiVA: diva2:279088
Conference
Microwave Symposium Digest, 2008 IEEE MTT-S International
Available from: 2009-12-01 Created: 2009-12-01 Last updated: 2016-04-13Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Authority records BETA

Katardjiev, Ilia

Search in DiVA

By author/editor
Katardjiev, Ilia
By organisation
Solid State Electronics
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 824 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf