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Comparing XPS and ToF-ERDA measurement of high-k dielectric materials
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics. (jonfysik)
2008 (English)In: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 100, no 1, 012036- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2008. Vol. 100, no 1, 012036- p.
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Engineering and Technology Subatomic Physics
Research subject
Ion Physics
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URN: urn:nbn:se:uu:diva-111106DOI: 10.1088/1742-6596/100/1/012036ISI: 000275655200036OAI: oai:DiVA.org:uu-111106DiVA: diva2:279408
Available from: 2009-12-03 Created: 2009-12-03 Last updated: 2017-12-12Bibliographically approved

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Martin, DavidKappertz, OliverJensen, Jens

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