uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Heavy ion beam-based nano- and micro-structuring of TiO2 single crystals using self-assembled masks
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics. (jonfysik)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Micro Structural Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
2008 (English)In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, E-ISSN 1872-9584, Vol. 266, no 12-13, 3113-3119 p.Article in journal (Refereed) Published
Abstract [en]

Fast heavy ion beam-based lithography using masks of self-assembled materials has been applied for transferring well-ordered nano- and micropatterns to rutile TiO2 single crystals. As the induced damage has a high etching selectivity the patterns can be developed in hydrofluoric acid with very high-contrast. Here we present resulting patterns when using a mask of self-ordered silica spheres. The obtained pattern are replicas of the mass distribution of the mask. In addition the shape and size of the regular structures depend on the applied ion energy and fluence. Direct modifications of the optical properties of TiO2 in a well-defined pattern are also presented. (c) 2008 Elsevier B.V. All rights reserved.

Place, publisher, year, edition, pages
2008. Vol. 266, no 12-13, 3113-3119 p.
National Category
Engineering and Technology Subatomic Physics
Research subject
Ion Physics
Identifiers
URN: urn:nbn:se:uu:diva-111107DOI: 10.1016/j.nimb.2008.03.220ISI: 000257721300097OAI: oai:DiVA.org:uu-111107DiVA: diva2:279410
Note
Conference Information: 14th International Conference on Radiation Effects in Insulators (REI-14) Univ Caen, Caen, FRANCE, AUG 28-SEP 01, 2007Available from: 2009-12-03 Created: 2009-12-03 Last updated: 2017-12-12Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text
By organisation
Ion PhysicsMicro Structural TechnologyMicrosystems Technology
In the same journal
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Engineering and TechnologySubatomic Physics

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 865 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf