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Micromachined Thin Film Plate Acoustic Wave Resonators (FPAR) Part II
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2009 (English)In: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, ISSN 0885-3010, E-ISSN 1525-8955, Vol. 56, no 12, 2701-2710 p.Article in journal (Refereed) Published
Abstract [en]

Improved performance thin-film plate acousticwave resonators (FPAR) using the lowest order symmetricLamb wave (S0) propagating in highly textured AlN membraneshave been previously demonstrated for the first time.In this work, an experimental study of the resonators’ performancevs. a variety of design parameters is performed. Devicesoperating in the vicinity of the stopband center exhibiting aQ-value of up to 3000 at a frequency of around 875 MHz aredemonstrated. Further, low-loss high-Q micromachined 2-portlongitudinally coupled thin-film resonators using the S0 modeare demonstrated for the first time. For the analysis of theproposed structures, the coupling-of-modes (COM) approachis successfully employed. Initially, the COM model is used forthe extraction of physical parameters from one-port FPARmeasurements. Subsequently, using the COM model, a satisfactoryagreement with the proposed experimental frequencycharacteristics of S0 2-port FPARs has been achieved, andpossibilities for further improvements in the performance discussed.Finally, the frequency spectrum of the one-port deviceshas been studied and the excited plate modes at differentfrequencies identified and presented with their Q-factors andtemperature coefficients of frequency (TCF).

Place, publisher, year, edition, pages
2009. Vol. 56, no 12, 2701-2710 p.
Keyword [en]
Thin films, Resonator, Micromachining, MEMS, NEMS
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
URN: urn:nbn:se:uu:diva-111379DOI: 10.1109/TUFFC.2009.1361ISI: 000272593100011OAI: oai:DiVA.org:uu-111379DiVA: diva2:280885
Projects
VR Funded "Thin Film Guided Microacoustic Waves in Periodical Structures: Theory and Applications"
Funder
Swedish Research Council, 2009-5056
Available from: 2009-12-12 Created: 2009-12-12 Last updated: 2017-12-12
In thesis
1. Thin Film Plate Acoustic Resonators for Frequency Control and Sensing Applications
Open this publication in new window or tab >>Thin Film Plate Acoustic Resonators for Frequency Control and Sensing Applications
2012 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

The recent development of the commercially viable thin film electro-acoustic technology has triggered a growing interest in the research of plate guided wave or Lamb wave components owing to their unique characteristics. In the present thesis i) an experimental study of the thin film plate resonators (FPAR) performance operating on the lowest symmetrical Lamb wave (S0) propagating in highly textured AlN membranes versus a variety of design parameters has been performed. The S0 mode is excited through an Interdigital Transducer and confined within the structure by means of reflection from metal strip gratings. Devices operating in the vicinity of the stop-band center exhibiting a Q-value of up to 3000 at a frequency around 900MHz have been demonstrated. Temperature compensation of this type of devices has been studied theoretically and successfully realized experimentally for the first time. Further, integrated circuit-compatible S0 Lamb based two-port FPAR stabilized oscillators exhibiting phase noise of -92 dBc/Hz at 1 kHz frequency offset with feasible thermal noise floor below -180 dBc/Hz have been tested under high power for a couple of weeks. More specifically, the FPARs under test have been running without any performance degradation at up to 27 dBm loop power. Further, the S0 mode was experimentally demonstrated to be highly mass and pressure sensitive as well as suitable for in-liquid operation, which together with low phase noise and high Q makes it very suitable for sensor applications; ii) research in view of FPARs operating on other types of Lamb waves as well as novel operation principles has been initiated. In this work, first results on the design, fabrication and characterization of two novel type resonators: The Zero Group Velocity Resonators (ZGVR) and The Intermode-Coupled Thin Film Plate Acoustic Resonators (IC-FPAR), exploiting new principles of operation have been successfully demonstrated. The former exploits the intrinsic zero group velocity feature of the S1 Lamb mode for certain combination of design parameters while the latter takes advantage of the intermode interaction (involving scattering) between S0 and A1 Lamb modes through specially designed metal strip gratings (couplers). Thus both type of resonators operate on principles of confining energy under IDT other than reflection.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2012. 80 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 959
Keyword
Electro-Acoustics, FPAR, Lamb waves, aluminium nitride, interdigital transducer, phase noise, temperature compensation, power handling, sensitivity, zero group velocity, intermode coupling
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Engineering Science with specialization in Electronics; Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-178592 (URN)978-91-554-8437-8 (ISBN)
Public defence
2012-09-28, Polhemsalen, Ångströmlaboratoriet, Läggerhyddsvägen 1, Uppsala, 09:15 (English)
Opponent
Supervisors
Available from: 2012-09-06 Created: 2012-08-01 Last updated: 2013-01-22Bibliographically approved

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Yantchev, VentsislavArapan, LiliaKatardjiev, Ilia

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