Micromachined Thin Film Plate Acoustic Wave Resonators (FPAR) Part II
2009 (English)In: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, ISSN 0885-3010, E-ISSN 1525-8955, Vol. 56, no 12, 2701-2710 p.Article in journal (Refereed) Published
Improved performance thin-film plate acousticwave resonators (FPAR) using the lowest order symmetricLamb wave (S0) propagating in highly textured AlN membraneshave been previously demonstrated for the first time.In this work, an experimental study of the resonators’ performancevs. a variety of design parameters is performed. Devicesoperating in the vicinity of the stopband center exhibiting aQ-value of up to 3000 at a frequency of around 875 MHz aredemonstrated. Further, low-loss high-Q micromachined 2-portlongitudinally coupled thin-film resonators using the S0 modeare demonstrated for the first time. For the analysis of theproposed structures, the coupling-of-modes (COM) approachis successfully employed. Initially, the COM model is used forthe extraction of physical parameters from one-port FPARmeasurements. Subsequently, using the COM model, a satisfactoryagreement with the proposed experimental frequencycharacteristics of S0 2-port FPARs has been achieved, andpossibilities for further improvements in the performance discussed.Finally, the frequency spectrum of the one-port deviceshas been studied and the excited plate modes at differentfrequencies identified and presented with their Q-factors andtemperature coefficients of frequency (TCF).
Place, publisher, year, edition, pages
2009. Vol. 56, no 12, 2701-2710 p.
Thin films, Resonator, Micromachining, MEMS, NEMS
Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Engineering Science with specialization in Microsystems Technology
IdentifiersURN: urn:nbn:se:uu:diva-111379DOI: 10.1109/TUFFC.2009.1361ISI: 000272593100011OAI: oai:DiVA.org:uu-111379DiVA: diva2:280885
ProjectsVR Funded "Thin Film Guided Microacoustic Waves in Periodical Structures: Theory and Applications"
FunderSwedish Research Council, 2009-5056