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Micro- and nanostructured magnetic field sensor for space applications
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (Ångström Space Technology Centre)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (Ångström Space Technology Centre)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
2009 (English)In: 15th International Conference on Solid-State SensorsTransducers 2009: Actuators and Microsystems, 2009, 1190-1193 p.Conference paper, Published paper (Refereed)
Abstract [en]

Magnetometers are popular payloads on scientific space missions. Here, the design and fabrication process of a miniaturized magnetometer based on tunneling magnetoresistance is presented. The process is capable of making magnetic tunnel junctions in a wide size range, by employing both UV lithography and focused ion beam milling and deposition. Ga implantation in the ferromagnetic electrodes of the junction is studied in more detail. It was shown that Ga implantation may harm the magnetometer if the irradiation dose exceeds 1014 Ga+ cm-2.

Place, publisher, year, edition, pages
2009. 1190-1193 p.
Keyword [en]
aerospace instrumentation ferromagnetic materials focused ion beam technology gallium ion implantation magnetic field measurement magnetic sensors magnetometers microelectrodes microsensors milling sputtered coatings tunnelling magnetoresistance ultraviolet lithography
National Category
Aerospace Engineering
Research subject
Materials Science
Identifiers
URN: urn:nbn:se:uu:diva-111623DOI: 10.1109/SENSOR.2009.5285916OAI: oai:DiVA.org:uu-111623DiVA: diva2:281912
Conference
Transducers 2009
Note

microstructured magnetic field sensor nanostructured magnetic field sensor space applications scientific space missions miniaturized magnetometer tunneling magnetoresistance magnetic tunnel junction UV lithography focused ion beam milling focused ion beam deposition ferromagnetic electrode implantation Ga

Available from: 2009-12-17 Created: 2009-12-17 Last updated: 2016-04-14Bibliographically approved

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Publisher's full texthttp://ieeexplore.ieee.org/search/wrapper.jsp?arnumber=5285916

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Persson, AndersNguyen, HugoRiddar, FridaThornell, Greger

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