Micro- and nanostructured magnetic field sensor for space applications
2009 (English)In: 15th International Conference on Solid-State SensorsTransducers 2009: Actuators and Microsystems, 2009, 1190-1193 p.Conference paper (Refereed)
Magnetometers are popular payloads on scientific space missions. Here, the design and fabrication process of a miniaturized magnetometer based on tunneling magnetoresistance is presented. The process is capable of making magnetic tunnel junctions in a wide size range, by employing both UV lithography and focused ion beam milling and deposition. Ga implantation in the ferromagnetic electrodes of the junction is studied in more detail. It was shown that Ga implantation may harm the magnetometer if the irradiation dose exceeds 1014 Ga+ cm-2.
Place, publisher, year, edition, pages
2009. 1190-1193 p.
aerospace instrumentation ferromagnetic materials focused ion beam technology gallium ion implantation magnetic field measurement magnetic sensors magnetometers microelectrodes microsensors milling sputtered coatings tunnelling magnetoresistance ultraviolet lithography
Research subject Materials Science
IdentifiersURN: urn:nbn:se:uu:diva-111623DOI: 10.1109/SENSOR.2009.5285916OAI: oai:DiVA.org:uu-111623DiVA: diva2:281912
microstructured magnetic field sensor nanostructured magnetic field sensor space applications scientific space missions miniaturized magnetometer tunneling magnetoresistance magnetic tunnel junction UV lithography focused ion beam milling focused ion beam deposition ferromagnetic electrode implantation Ga2009-12-172009-12-172016-04-14Bibliographically approved