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Hollow Cathode and Hybrid Plasma Processing at Low and High Pressures
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electricity.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electricity.
2008 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
Institute of Physics, London, 2008.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-113510OAI: oai:DiVA.org:uu-113510DiVA, id: diva2:290992
Conference
Plasmas, Surfaces and Thin Films Meeting
Available from: 2010-01-29 Created: 2010-01-29 Last updated: 2016-04-12Bibliographically approved

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Baránková, HanaBárdos, Ladislav

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CiteExportLink to record
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