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Zero Mass Loading Sensitivity of the S0 Lamb wave Resonance in thin film plate acoustic resonators (FPARs)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2009 (English)In: 2009 International IEEE Ultrasonic Symposium, 2009Conference paper (Refereed)
Abstract [en]

Synchronously designed FPARs are typically operating at the upper stopband edge of the frequency stopband due to the negative reflection coefficient of the lowest order symmetric Lamb wave (S0) in periodic strp gratings. In this study the possibility to achieve 0-sensitivity of the upper stopband edge with respec to electrode thickness tolerances is discussed for AlN based FPAR employing Al strip reflectors. 0-sensitive topologies are identified  through COMSOL FEM experiments

Place, publisher, year, edition, pages
Keyword [en]
Thin Film, Plate wave, Resonator, Performance Analysis
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-113625OAI: oai:DiVA.org:uu-113625DiVA: diva2:291477
2009 Int. IEEE Ultrasonic Symposium
VR Granted: "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications"
In PrintAvailable from: 2010-02-01 Created: 2010-02-01 Last updated: 2010-02-19Bibliographically approved

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Yantchev, Ventsiaslav
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Solid State Electronics
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