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Implantation of anatase thin film with 100 keV 56Fe ions: Damage formation and magnetic behaviour
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2009 (English)In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, E-ISSN 1872-9584, Vol. 267, no 16, 2725-2730 p.Article in journal (Refereed) Published
Abstract [en]

We have investigated the damage morphology and magnetic properties of titanium dioxide thin films following implantation with Fe ions. The titanium dioxide films, having a polycrystalline anatase structure, were implanted with 100 keV 56Fe+ ions to a total fluence of 1.3 × 1016 ions/cm2. The ion bombardment leads to an amorphized surface with no indication of the presence of secondary phases or Fe clusters. The ion-beam induced damage manifested itself by a marked change in surface morphology and film thickness. A room temperature ferromagnetic behaviour was observed by SQUID in the implanted sample. It is believed that the ion-beam induced damage and defects in the polycrystalline anatase film were partly responsible for the observed magnetic response.

Place, publisher, year, edition, pages
2009. Vol. 267, no 16, 2725-2730 p.
Keyword [en]
Ion implantation, Magnetic semiconductors, Fe-doping, Titanium dioxide, Anatase, Magnetron sputtering
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-113667DOI: 10.1016/j.nimb.2009.05.055ISI: 000272422400039ISBN: 0168-583X (print)OAI: oai:DiVA.org:uu-113667DiVA: diva2:291596
Available from: 2010-02-02 Created: 2010-02-02 Last updated: 2017-12-12Bibliographically approved

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Publisher's full texthttp://www.sciencedirect.com/science/article/B6TJN-4WD1BTD-1/2/1e9290117fa9cf2a5ee503f827b7343b

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Jensen, J.Martin, DavidKubart, Tomas

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