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Synchrotron radiation technology: spectroscopic studies of its application to lithography and deposition, and the evaluation, modeling, and design of beamline instrumentation
Uppsala University, Disciplinary Domain of Science and Technology.
1994 (English)Doctoral thesis, comprehensive summary (Other academic)
Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis , 1994. , 26 p.
Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1104-232X ; 40
National Category
Natural Sciences
URN: urn:nbn:se:uu:diva-115597ISBN: 91-554-3283-2OAI: oai:DiVA.org:uu-115597DiVA: diva2:295608
Available from: 2010-02-17 Created: 2010-02-17

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