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Preferential Sputtering of Oxides and Target Design for Stable Reactive Magnetron Deposition of Oxides
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2009 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2009.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-121232OAI: oai:DiVA.org:uu-121232DiVA: diva2:304741
Conference
Proceedings, International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2009) in San Diego April 27-May 1
Available from: 2010-03-19 Created: 2010-03-19 Last updated: 2016-04-14Bibliographically approved

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Kubart, TomasNyberg, TomasBerg, Sören

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CiteExportLink to record
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