An In-Situ Prepared Nano-Manipulator Tip for Electrical Characterization of Free Standing Graphene Like Sheets Inside a Focused Ion Beam/Scanning Electron Microscope
2011 (English)In: Journal of Nanoelectronics and Optoelectronics, ISSN 1555-130X, E-ISSN 1555-1318, Vol. 6, no 2, 162-168 p.Article in journal (Refereed) Published
Although contacting and moving atoms has been demonstrated using probe techniques, for many nano-objects, a fast and reproducible nano-probe technique is needed to acquire a large number of electrical measurements on nano-objects that are often similar but not the identical. Nano-manipulators have become a common tool in many scanning electron microscopes (SEM) and focussed ion beam devices (FIB). They can be rapidly and reproducibly moved from one nano-object to another. In this work we present a procedure to obtain reproducible electrical measurements of nano- to micron-sized objects by using a sharp, tungsten tip with well defined surface properties. The tip is a part of a manipulator and is sharpened in-situ by using the gallium ion beam inside a focused ion beam/scanning electron microscope (FIB/SEM). The contact resistance between a Au surface and the tip is 70 kΩ before the sharpening procedure and 10 Ω after sharpening. The leakage current of the total set-up of 10pA makes it possible to measure currents through a variety of nano-objects. This measurement technique is applied to measure the resistance of as grown, water treated and two HCl treated carbon nanosheets (CNS). These CNS vary in size and morphology. Using this nano-contacting set-up, we could obtain measurements of more than 400 different CNS. The obtained histograms allow us to observe a clear decrease of the resistance between original and 3 hour acid treated CNSs. We observe that longer periods of exposure of the CNS to the HCl do not further modify the resistance.
Place, publisher, year, edition, pages
American Scientific , 2011. Vol. 6, no 2, 162-168 p.
Focused ion beam, FIB, electrical characterization, Nano-sized object
Nano Technology Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Engineering Science with specialization in Materials Analysis; Engineering Science with specialization in Materials Science
IdentifiersURN: urn:nbn:se:uu:diva-122954DOI: 10.1166/jno.2011.1154ISI: 000296210100013OAI: oai:DiVA.org:uu-122954DiVA: diva2:311483