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ERD analysis and modification of TiO2 thin films with heavy ions
Linkoping University. (Department of Physics, Chemistry and Biology)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, Materials Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2010 (English)In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, E-ISSN 1872-9584, Vol. 268, no 11-12, 1893-1898 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2010. Vol. 268, no 11-12, 1893-1898 p.
Keyword [en]
Titanium dioxide, Thin films, Ion beam analysis, Elastic recoil detection, Ion beam modification
National Category
Engineering and Technology
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URN: urn:nbn:se:uu:diva-126509DOI: 10.1016/j.nimb.2010.02.051ISI: 000278702300044OAI: oai:DiVA.org:uu-126509DiVA: diva2:324553
Available from: 2010-06-15 Created: 2010-06-15 Last updated: 2017-12-12Bibliographically approved

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Martin, DavidKubart, Tomas

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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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