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Interaction of NiSi with dopants for metallic source/drain applications
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2010 (English)In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 28, no 1, C1I1-C1I11 p.Article in journal (Refereed) Published
Abstract [en]

This work has a focus on NiSi as a possible metallic contact for aggressively scaled complementary metal oxide semiconductor devices. As the bulk work function of NiSi lies close to the middle of Si bandgap, the Schottky barrier height (SBH) of NiSi is rather large for both electron ( ∼ 0.65 eV) and hole ( ∼ 0.45 eV). Different approaches have therefore been intensively investigated in the literature aiming at reducing the effective SBH: dopant segregation (DS), surface passivation (SP), and alloying, in order to improve the carrier injection into the conduction channel of a field-effect transistor. The present work explores DS using B and As for the NiSi/Si contact system. The effects of C and N implantation into Si substrate prior to the NiSi formation are examined, and it is found that the presence of C yields positive effects in helping reduce the effective SBH to 0.1–0.2 eV for both conduction polarities. A combined use of DS or SP with alloying could be considered for more effective control of effective SBH, but an examination of undesired compound formation and its probable consequences is necessary. Furthermore, an analysis of the metal silicides that have a small “intrinsic” SBH reveals that only a very small number of them are of practical interest as most of the silicides require either a high formation temperature or possess a high specific resistivity.

Place, publisher, year, edition, pages
2010. Vol. 28, no 1, C1I1-C1I11 p.
Keyword [en]
alloying, carbon, charge injection, electrical resistivity, elemental semiconductors, energy gap, field effect transistors, impurity distribution, ion implantation, nickel alloys, nitrogen, passivation, Schottky barriers, segregation, silicon, silicon alloys, work function
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-129659DOI: 10.1116/1.3248267ISI: 000275511800013OAI: oai:DiVA.org:uu-129659DiVA: diva2:344694
Available from: 2010-08-20 Created: 2010-08-20 Last updated: 2017-12-12Bibliographically approved

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Luo, JunZhang, ZhenZhang, Shi-Li

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