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FBAR sensor array for in liquid operation
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2010 (English)In: IEEE Sensors Journal, ISSN 1530-437X, E-ISSN 1558-1748, Vol. 10, no 12, 1903-1904 p.Article in journal (Refereed) Published
Abstract [en]

This letter discusses the design of thickness shear mode thin-film bulk acoustic resonator (FBAR) sensor array for in liquid operation with respect to minimizing the observed Q-degradation and crosstalk.

Place, publisher, year, edition, pages
2010. Vol. 10, no 12, 1903-1904 p.
Keyword [en]
Aluminumnitride; biomedical transducers; bulk acoustic wave (BAW) devices; crosstalk
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-130118DOI: 10.1109/JSEN.2010.2051944ISI: 000283444900006OAI: oai:DiVA.org:uu-130118DiVA: diva2:346497
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Note

Electronically published since May 11, 2010

Available from: 2010-09-01 Created: 2010-09-01 Last updated: 2017-12-12Bibliographically approved

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Martin, David M.Yantchev, VentsislavKatardjiev, Ilia

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