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High-pressure stainless steel active membrane microvalves
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
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2011 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 21, no 7, 075010- p.Article in journal (Refereed) Published
Abstract [en]

In this work, high-pressure membrane microvalves have been designed, manufactured andevaluated. The valves were able to withstand back-pressures of 200 bar with a response timeof less than 0.6 s. These stainless steel valves, manufactured with back-end batch production,utilize the large volume expansion coupled to the solid–liquid phase transition in paraffin wax.When membrane materials were evaluated, parylene coated stainless steel was found to be thebest choice as compared to polydimethylsiloxane and polyimide. Also, the influence of theorifice placement and diameter is included in this work. If the orifice is placed too close to therim of the membrane, the valve can stay sealed even after turning the power off, and the valvewill not open until the pressure in the system is released. The developed steel valves, evaluatedfor both water and air, provide excellent properties in terms of mechanical stability, ease offabrication, and low cost. Possible applications include sampling at high pressures, chemicalmicroreactors, high performance liquid chromatography, pneumatics, and hydraulics.

Place, publisher, year, edition, pages
2011. Vol. 21, no 7, 075010- p.
Keyword [en]
stainless steel, high pressure microvalve, paraffin
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
URN: urn:nbn:se:uu:diva-131007DOI: 10.1088/0960-1317/21/7/075010ISI: 000291935000024OAI: oai:DiVA.org:uu-131007DiVA: diva2:352383
Available from: 2010-09-20 Created: 2010-09-20 Last updated: 2017-12-12Bibliographically approved
In thesis
1. High-Pressure Microfluidics
Open this publication in new window or tab >>High-Pressure Microfluidics
2013 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

In this thesis, some fundamentals and possible applications of high-pressure microfluidics have been explored. Furthermore, handling fluids at high pressures has been addressed, specifically by creating and characterizing strong microvalves and pumps.

A variety of microstructuring techniques was used to realize these microfluidic devices, e.g., etching, lithography, and bonding. To be able to handle high pressures, the valves and pumps need to be strong. This necessitates a strong actuator material. In this thesis, the material of choice is paraffin wax.

A new way of latching paraffin-actuated microvalves into either closed or open position has been developed, using the low thermal conductivity of paraffin to create large thermal gradients within a microactuator. This allows for long open and closed times without power consumption.

In addition, three types of paraffin-actuated pumps are presented: A peristaltic high-pressure pump with integrated temperature control, a microdispensing pump with high repeatability, and a pump system with two pumps working with an offset to reduce flow irregularities. Furthermore, the fundamental behavior of paraffin as a microactuator material has been explored by finite element modeling.

One possibility that arises with high-pressure microfluidics, is the utilization of supercritical fluids for different applications. The unique combination of material properties found in supercritical fluids yields them interesting applications in, e.g., extraction and cleaning. In an attempt to understand the microfluidic behavior of supercritical carbon dioxide, the two-phase flow, with liquid water as the second phase, in a microchannel has been studied and mapped with respect to both flow regime and droplet behavior at a bi-furcating outlet.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2013. 53 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1085
Keyword
phase change, actuator, valve, pump, supercritical fluid
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-208915 (URN)978-91-554-8773-7 (ISBN)
Public defence
2013-11-29, Polhemsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, 751 21, Uppsala, 09:30 (English)
Opponent
Supervisors
Funder
Swedish Research Council
Available from: 2013-11-07 Created: 2013-10-10 Last updated: 2014-01-23
2. Microsystems for Harsh Environments
Open this publication in new window or tab >>Microsystems for Harsh Environments
2015 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

When operating microsystems in harsh environments, many conventionally used techniques are limiting. Further, depending on if the demands arise from the environment or the conditions inside the system, different approaches have to be used. This thesis deals with the challenges encountered when microsystems are used at high pressures and high temperatures.

For microsystems operating at harsh conditions, many parameters will vary extensively with both temperature and pressure, and to maintain control, these variations needs to be well understood. Covered within this thesis is the to-date strongest membrane micropump, demonstrated to pump against back-pressures up to 13 MPa, and a gas-tight high pressure valve that manages pressures beyond 20 MPa.

With the ability to manipulate fluids at high pressures in microsystems at elevated temperatures, opportunities are created to use green solvents like supercritical fluids like CO2. To allow for a reliable and predictable operation in systems using more than one fluid, the behavior of the multiphase flow needs to be controlled. Therefore, the effect of varying temperature and pressure, as well as flow conditions were investigated for multiphase flows of CO2 and H2O around and above the critical point of CO2. Also, the influence of channel surface and geometry was investigated.

Although supercritical CO2 only requires moderate temperatures, other supercritical fluids or reactions require much higher temperatures. The study how increasing temperature affects a system, a high-temperature testbed inside an electron microscope was created.

One of the challenges for high-temperature systems is the interface towards room temperature components. To circumvent the need of wires, high temperature wireless systems were studied together with a wireless pressure sensing system operating at temperatures up to 1,000 °C for pressures up to 0.3 MPa.

To further extend the capabilities of microsystems and combine high temperatures and high pressures, it is necessary to consider that the requirements differs fundamentally. Therefore, combining high pressures and high temperatures in microsystems results in great challenges, which requires trade-offs and compromises. Here, steel and HTCC based microsystems may prove interesting alternatives for future high performance microsystems.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2015. 50 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1263
Keyword
Microsystems, harsh environments, high pressures, high temperatures, supercritical microfluidics
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-253558 (URN)978-91-554-9272-4 (ISBN)
Public defence
2015-09-11, Häggsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 09:15 (English)
Opponent
Supervisors
Available from: 2015-08-19 Created: 2015-05-29 Last updated: 2015-09-07

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Ogden, SamKlintberg, LenaHjort, Klas

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