A micromachined dual-axis beam steering actuator for use in a miniaturized optical space communication system
2010 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 20, no 10, 105007- p.Article in journal (Refereed) Published
The design, fabrication and evaluation of an electrothermally actuated micromachined beam steering device for use in a free-space optical communication system intended for use on micro-and nanospacecraft in kilometer-sized formations are presented. SU-8 confined in v-grooves is heated to create bending movement in two orthogonal directions for two-axial steering with large static bending angles and low actuation voltages. Standard MEMS processing is used to fabricate the devices with square mirror side lengths of 1, 3.5 and 5 mm. In addition, a method to prevent thermal damage to SU-8 during deep reactive ion etching has been successfully developed. Characterization shows optical scan ranges larger than 40 degrees in both directions with the maximum driving voltage of 16 V corresponding to a total power consumption of 1.14 W. Infrared imaging is used to investigate thermal cross-talk between actuators for the two scanning directions. It is found that a silicon backbone on the joint backside is crucial for device performance. Differences from expected performance are believed to arise from the SU-8 curing process and excessive heating during fabrication. A finite element method simulation is used to find the eigenfrequencies of the structures, and these are in good agreement with the measured frequency response.
Place, publisher, year, edition, pages
2010. Vol. 20, no 10, 105007- p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-134362DOI: 10.1088/0960-1317/20/10/105007ISI: 000282270300020OAI: oai:DiVA.org:uu-134362DiVA: diva2:372277