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Diamond subwavelength gratings for mid-infrared diamond AGPM coronagraph: manufacturing assessment
Liège University, Hololab Group.
Liège University, Hololab Group.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
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2010 (English)In: EOSAM 2010, Paris, 2010Conference paper, Published paper (Refereed)
Abstract [en]

We present the manufacturing and measurement results obtained with a mid-infrared (L- band ~ 3.8 μm) diamond Annular Groove Phase Mask (AGPM) coronagraph (Mawet et al 20051), using subwavelength gratings and diamond-optimized micro-fabrication techniques such as Nano-Imprint Lithography and Reactive Ion Etching.

 

Place, publisher, year, edition, pages
2010.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-138222ISBN: 978-3-00-030509-2 (print)OAI: oai:DiVA.org:uu-138222DiVA: diva2:378950
Conference
EOSAM 2010, Paris
Available from: 2010-12-16 Created: 2010-12-16 Last updated: 2016-04-18Bibliographically approved

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Karlsson, MikaelNikolajeff, FredrikForsberg, Pontus

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