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Basic Understanding of the Pulsed DC Reactive Sputter Deposition Process
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
1999 (English)In: Invited to Second Asian-European Int Conf on Plasma Surface Engineering (AEPSE´99), Beijing, September 15-19, 1999Conference paper, Published paper (Refereed)
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1999.
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URN: urn:nbn:se:uu:diva-10173OAI: oai:DiVA.org:uu-10173DiVA: diva2:37941
Available from: 2007-03-01 Created: 2007-03-01

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Berg, SörenNyberg, TomasKatardjiev, Ilia

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