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Target Compound Layer Formation during Reactive Sputtering
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
1998 (English)In: Presented at AVS 45th National Symposium in Baltimore, Maryland, USA, November 2-6, 1998Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
1998.
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URN: urn:nbn:se:uu:diva-10186OAI: oai:DiVA.org:uu-10186DiVA: diva2:37954
Available from: 2007-03-02 Created: 2007-03-02

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