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Sputtering yield amplification in reactive sputtering
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2010 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2010.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-138813OAI: oai:DiVA.org:uu-138813DiVA: diva2:379958
Conference
53rd Annual Society of Vaccum Coaters Technical Conference in Orlando, April 17-22, 2010 and 53rd Annual Technical Conference Proceedings - Society of Vaccum Coaters, 2010
Available from: 2010-12-20 Created: 2010-12-20 Last updated: 2015-01-07Bibliographically approved

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Berg, SörenNyberg, TomasKubart, Tomas

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CiteExportLink to record
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