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Studies of TiN films deposited by HIPIMS at different substrate temperatures and substrate bias
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2010 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2010.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-138818OAI: oai:DiVA.org:uu-138818DiVA: diva2:379973
Conference
1st International Conference on HIPIMS, Sheffield, United Kingdom, July 6-7, 2010
Available from: 2010-12-20 Created: 2010-12-20 Last updated: 2015-01-07Bibliographically approved

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Särhammar, ErikNyberg, TomasKubart, TomasBerg, Sören

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