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Studies of hysteresis effect in reactive HiPIMS deposition of oxides
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2010 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2010.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-138822OAI: oai:DiVA.org:uu-138822DiVA: diva2:379983
Conference
12th International Conference on Plasma Surface Engineering 2010, Garmisch-Partenkirchen, Germany, September 13-17
Available from: 2010-12-20 Created: 2010-12-20 Last updated: 2015-01-07Bibliographically approved

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Kubart, TomasNyberg, TomasBerg, Sören

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