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Molecular dynamics simulations of low energy Ar sputtering of TiO2 surfaces
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, Materials Theory.
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, Materials Theory.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2010 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2010.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-138823OAI: oai:DiVA.org:uu-138823DiVA: diva2:379991
Conference
Ninth International Conference on Reactive Sputter Deposition 2010, Ghent, Belgium, December 9-10, 2010
Available from: 2010-12-20 Created: 2010-12-20 Last updated: 2015-01-07Bibliographically approved

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Kubart, TomasSkorodumova, Natalia V.Nyberg, TomasBerg, Sören

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