uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Discharge disruptions in a helicon plasma source
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Show others and affiliations
1997 (English)In: J Vac Sci Technol A, Vol. 15, no 6, 2864-2874 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1997. Vol. 15, no 6, 2864-2874 p.
URN: urn:nbn:se:uu:diva-10276OAI: oai:DiVA.org:uu-10276DiVA: diva2:38044
Available from: 2007-03-12 Created: 2007-03-12 Last updated: 2011-01-15

Open Access in DiVA

No full text

Search in DiVA

By author/editor
Blom, Hans-OlofBerg, Sören
By organisation
Department of Materials ScienceElectronics

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 345 hits
ReferencesLink to record
Permanent link

Direct link