Focused ion beam fabrication procedures of x-ray micro Fresnel zone plates
2007 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 17, no 3, 617-622 p.Article in journal (Refereed) Published
In this paper the use of focused ion beam (FIB) mask-less lithography is presented as a novel and simple way to fabricate x-ray Fresnel zone plates (FZPs), and a prototype of a FIB-made 100 nm resolution FZP with 38 zones is described. Considerations for future developments—the maximum aspect ratio achievable by FIB lithography in nickel, a way to produce zones with a parabolic transverse profile, as theoretically required for the highest efficiency in focusing—are also reported.
Place, publisher, year, edition, pages
2007. Vol. 17, no 3, 617-622 p.
Physical Sciences Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-10709DOI: 10.1088/0960-1317/17/3/026OAI: oai:DiVA.org:uu-10709DiVA: diva2:38477