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IC compatible MEMS technologies
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2005 (English)In: 35th European Microwave Conference (EuMC), 2005Conference paper (Refereed)
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URN: urn:nbn:se:uu:diva-10713OAI: oai:DiVA.org:uu-10713DiVA: diva2:38481
Available from: 2007-04-20 Created: 2007-04-20

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Öjefors, ErikLindberg, PeterRydberg, Anders
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