uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Aluminium Nitride Deposition on 4H-SiC by Means of Physical Vapour Deposition
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
2006 (English)In: Thin Solid Films, Vol. 515, 456-459 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2006. Vol. 515, 456-459 p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-11006OAI: oai:DiVA.org:uu-11006DiVA: diva2:38774
Available from: 2007-05-09 Created: 2007-05-09 Last updated: 2016-06-22

Open Access in DiVA

No full text

By organisation
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 347 hits
ReferencesLink to record
Permanent link

Direct link