Immunosensor utilizing a shear mode thin film bulk acoustic sensor
2007 (English)In: Sensors and actuators. B, Chemical, ISSN 0925-4005, Vol. 127, no 1, 248-252 p.Article in journal (Refereed) Published
An AlN thin film electro-acoustic resonator has been fabricated employing a reactive sputtering process for the deposition of an AlN thin film with inclined c-axis for excitation of the shear mode for operation in liquid media. The main objective is to investigate the efficiency of the micro-fluidic channel system integrated in the silicon wafer underneath the AlN resonator. A comparative study between the shear mode thin film bulk acoustic resonator (FBAR) and a quartz crystal microbalance (QCM) using a competitive antibody–antigen association process for detection of drug molecules is presented.
Place, publisher, year, edition, pages
2007. Vol. 127, no 1, 248-252 p.
Competitive immunosensor, Shear mode FBAR, Drug detection
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-11757DOI: 10.1016/j.snb.2007.07.051ISI: 000250691100039OAI: oai:DiVA.org:uu-11757DiVA: diva2:39526