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Structural and tribological properties of cluster-assembled CNx films
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2007 (English)In: Applied Physics A: Materials Science & Processing, ISSN 0947-8396, E-ISSN 1432-0630, Vol. 87, no 4, 767-772 p.Article in journal (Refereed) Published
Abstract [en]

We report the structural and tribological characterization of nanostructured CNx thin films produced by the deposition of a supersonic carbon cluster beam assisted by nitrogen ion bombardment. The influence of the deposition parameters on the chemical composition and structure of the films has been systematically studied by X-ray photoelectron spectroscopy, elastic recoil detection analysis, transmission electron microscopy and atomic force microscopy. Depending on the deposition parameters, the films show a structure ranging from amorphous to disordered graphitic with interlinked planes. Nitrogen content depends on the nitrogen ion kinetic energy. The films have a very low density with a high surface roughness. Friction measurements at the nanoscale show a correlation between nitrogen content and mechanical properties of the system.

Place, publisher, year, edition, pages
2007. Vol. 87, no 4, 767-772 p.
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Physical Sciences Engineering and Technology
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URN: urn:nbn:se:uu:diva-145392DOI: 10.1007/s00339-007-3898-8ISI: 000245964300030OAI: oai:DiVA.org:uu-145392DiVA: diva2:396036
Available from: 2011-02-08 Created: 2011-02-08 Last updated: 2017-12-11Bibliographically approved

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