Structural and tribological properties of cluster-assembled CNx films
2007 (English)In: Applied Physics A: Materials Science & Processing, ISSN 0947-8396, E-ISSN 1432-0630, Vol. 87, no 4, 767-772 p.Article in journal (Refereed) Published
We report the structural and tribological characterization of nanostructured CNx thin films produced by the deposition of a supersonic carbon cluster beam assisted by nitrogen ion bombardment. The influence of the deposition parameters on the chemical composition and structure of the films has been systematically studied by X-ray photoelectron spectroscopy, elastic recoil detection analysis, transmission electron microscopy and atomic force microscopy. Depending on the deposition parameters, the films show a structure ranging from amorphous to disordered graphitic with interlinked planes. Nitrogen content depends on the nitrogen ion kinetic energy. The films have a very low density with a high surface roughness. Friction measurements at the nanoscale show a correlation between nitrogen content and mechanical properties of the system.
Place, publisher, year, edition, pages
2007. Vol. 87, no 4, 767-772 p.
Physical Sciences Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-145392DOI: 10.1007/s00339-007-3898-8ISI: 000245964300030OAI: oai:DiVA.org:uu-145392DiVA: diva2:396036