uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Microstructure and electrical properties of Ti-Si-C-Ag nanocomposite thin films
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Materials Chemistry.
Show others and affiliations
2007 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 201, no 14, 6465-6469 p.Article in journal (Refereed) Published
Abstract [en]

Ti-Si-C-Ag nanocomposite coatings consisting of nanocrystalline TiC in an amorphous Si matrix with segregated Ag were deposited by dual magnetron sputtering from Ti3SiC2 and Ag targets. As evidenced by X-ray diffraction, scanning electron microscopy, and transmission electron microscopy, for Ag contents below 10 at.%, the Ag forms similar to 10 nm large crystallites that are homogeneously distributed in the films. For higher Ag contents, coalescence during growth results in the formation of > similar to 100 nm Ag islands on the film surface. The electrical resistivity of the coatings was measured in a four-point-probe setup, and ranged from 340 mu Omega cm (for Ti-Si-C coatings without Ag) to 40 mu Omega cm (for high Ag content).

Place, publisher, year, edition, pages
2007. Vol. 201, no 14, 6465-6469 p.
Keyword [en]
sputtering, titanium carbide, silver, resistivity, X-ray diffraction, electron microscopy
National Category
Chemical Sciences
URN: urn:nbn:se:uu:diva-145489DOI: 10.1016/j.surfcoat.2006.12.016ISI: 000245065200039OAI: oai:DiVA.org:uu-145489DiVA: diva2:396271
Available from: 2011-02-09 Created: 2011-02-09 Last updated: 2011-02-09Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text
By organisation
Department of Materials Chemistry
In the same journal
Surface & Coatings Technology
Chemical Sciences

Search outside of DiVA

GoogleGoogle Scholar

Altmetric score

Total: 129 hits
ReferencesLink to record
Permanent link

Direct link